YANG Mei, YU Wei, ZHANG YING, SHI Yu. Development of a beam-membrane structure micro-pressure sensor[J]. Journal of Experiments in Fluid Mechanics, 2010, 24(2): 74-76,96. DOI: 10.3969/j.issn.1672-9897.2010.02.016
Citation: YANG Mei, YU Wei, ZHANG YING, SHI Yu. Development of a beam-membrane structure micro-pressure sensor[J]. Journal of Experiments in Fluid Mechanics, 2010, 24(2): 74-76,96. DOI: 10.3969/j.issn.1672-9897.2010.02.016

Development of a beam-membrane structure micro-pressure sensor

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