Calibration results and analysis of thin-film gauges calibrated with the transfer method

Considering the fact that there are more error sources in the measured heat flux with thin-film gauges when the two-stage approach is applied to determine the thermal product and resistance–temperature factor, the transfer method is applied to directly calibrate thin-film gauges, in which the thermal product and resistance-temperature factor are treated as the sensitivity coefficients. To get the consistent calibration results of different thin-film gauges fabricated in a batch, the sensitivity coefficients are divided by the resistance–temperature factors of the thin-film gauges, and then the correction sensitivity coefficients are consistent. With the transfer calibration technique, the calibration results of thin-film gauges show a good linearity with a relative expanded uncertainty below 6.5%, which is lower than that reported in other researches, in which the two-stage approach is used to calibrate thin-film gauges.