High temperature dynamic pressure sensor and experimental analysis

Rahman·Hebibul; Wang Hongyan; Xue Fangzheng; Huang Linya; Huang Mimi; Yu Mingzhi; Zhao Libo

doi:10.11729/syltlx20170028

Volume 31 Issue 2

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Journal of Experiments in Fluid Mechanics > 2017 > 31(2): 44-50. > DOI: 10.11729/syltlx20170028

Rahman·Hebibul, Wang Hongyan, Xue Fangzheng, Huang Linya, Huang Mimi, Yu Mingzhi, Zhao Libo. High temperature dynamic pressure sensor and experimental analysis[J]. Journal of Experiments in Fluid Mechanics, 2017, 31(2): 44-50. DOI: 10.11729/syltlx20170028

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High temperature dynamic pressure sensor and experimental analysis

1.
School of Automotive, Mechanical and Electrical Engineering, Xinjiang Vocational & Technical College of Communications, Urumqi 831401, China
2.
Shaanxi Institute of Metrology Science, Xi'an 710065, China
3.
Northwest Institute of Nuclear Technology, Xi'an 710024, China
4.
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China

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Received Date: December 19, 2016
Revised Date: February 24, 2017

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Abstract

Abstract

The inverted cup-type high-temperature piezoresistive pressure sensitive chip with the range of 25MPa was developed by the Micro Electro-Mechanical Systems (MEMS) and Silicon on Insulator (SOI) technology. The sensitive piezoresistors are isolated from the silicon substrate by the silicon dioxide, and thus the stability and reliability problems of the pressure sensitive chip are solved at high temperatures beyond 120℃. The flush-type mechanical packaging structure was designed to avoid the channeling effect and improve the dynamic response frequency of the sensor. For the fabricated high temperature dynamic pressure sensor, the static and dynamic performance experiments were carried out to obtain the sensor's fundamental performance and analyze its uncertainty at the static experimental temperature of 250℃. The results show that the sensor accuracy is ±0.114%FS and the uncertainty is 0.017 94mV. The thermal zero drift and thermal sensitivity drift were calculated. The dynamic response frequency was calculated as 555.6 kHz through dynamic performance experiment. Therefore, the developed MEMS pressure sensor has fine accuracy and high natural frequency at high temperatures.
- MEMS,
- SOI inverted cup-type sensitive chip,
- flush-type,
- high frequency,
- uncertainty

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