Sun Baoyun, Ma Binghe, Deng Jinjun, Jiang Chengyu. Research progress on thermal wall shear stress sensors[J]. Journal of Experiments in Fluid Mechanics, 2017, 31(2): 26-33, 43. DOI: 10.11729/syltlx20170022
Citation:
Sun Baoyun, Ma Binghe, Deng Jinjun, Jiang Chengyu. Research progress on thermal wall shear stress sensors[J]. Journal of Experiments in Fluid Mechanics, 2017, 31(2): 26-33, 43. DOI: 10.11729/syltlx20170022
Sun Baoyun, Ma Binghe, Deng Jinjun, Jiang Chengyu. Research progress on thermal wall shear stress sensors[J]. Journal of Experiments in Fluid Mechanics, 2017, 31(2): 26-33, 43. DOI: 10.11729/syltlx20170022
Citation:
Sun Baoyun, Ma Binghe, Deng Jinjun, Jiang Chengyu. Research progress on thermal wall shear stress sensors[J]. Journal of Experiments in Fluid Mechanics, 2017, 31(2): 26-33, 43. DOI: 10.11729/syltlx20170022
Research progress on thermal wall shear stress sensors
Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.
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