Calibration of MEMS wall shear-stress-sensors array for underwater applications

The measurement of wall shear stress on hydrodynamic surface is important for the design of advanced naval technology,and,accurate calibration,especially the static calibration, of the shear stress sensor is indispensable to any practical measurement.In the paper,an under-water calibration apparatus is developed based on analyzing the existing calibration methods.CFD simulation is performed to predict the wall shear stress input for the static calibration,and facili-tate the design of calibration schedule.Then a typical thermal MEMS shear-stress-sensors array is statically calibrated for underwater applications.The calibration coefficients of the sensors in the array are obtained in situ,which would be of use to the future underwater model tests.