MEMS热膜式壁面剪应力传感器微弱信号检测

孙海浪; 田于逵; 金磊; 张璇; 谢华

doi:10.11729/syltlx20170016

MEMS热膜式壁面剪应力传感器微弱信号检测

doi: 10.11729/syltlx20170016

孙海浪^1, ,,
田于逵¹,
金磊²,
张璇¹,
谢华¹

1.
中国船舶科学研究中心, 水动力学国防科技重点实验室, 江苏无锡 214082
2.
杭州金恒电源科技有限公司, 杭州 311112

基金项目:

国家重大科学仪器设备开发专项 2013YQ04091107

详细信息

通讯作者:
孙海浪 (1987-), 男, 江苏淮安人, 工程师。研究方向:实验流体力学。通信地址:江苏省无锡市滨湖区山水东路222号 (214082)。E-mail:sun.hl@163.com

中图分类号: TP212
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- 文章访问数: 205
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- PDF下载量: 5
- 被引次数: 0
出版历程
- 收稿日期: 2016-12-15
- 修回日期: 2017-02-24
- 刊出日期: 2017-04-25

Weak signal detection of MEMS hot-film wall shear stress sensors

1.
National Key Laboratory of Science and Technology on Hydrodynamics, China Ship Scientific Research Center (CSSRC), Wuxi Jiangsu 214082, China
2.
Hangzhou Onforever Power Technology Co. Ltd, Hangzhou 311112, China

摘要

摘要: MEMS热膜式壁面剪应力传感器的输出信号是带有基础电压的微弱电压信号，无法通过放大器直接放大的方法实现高精度测量。文章提出在输出信号放大前增加信号平衡环节，在保留有效信号的前提下减小基础电压，再通过放大的方法实现其高精度测量，有效解决了MEMS热膜式壁面剪应力传感器微弱信号检测的难题。文章介绍了MEMS热膜式壁面剪应力传感器微弱信号检测的技术方案、关键技术、测试检验及试验应用实例。
- 微机电系统 /
- 热膜 /
- 壁面剪应力 /
- 传感器 /
- 微弱信号检测
Abstract: The weak signal of MEMS hot-film wall shear stress (WSS) sensors is hard to detect by direct amplification due to the inherent basic voltage. An effective method to solve this problem is proposed, which is to add an output-balancing system (OBS) before the signal is amplified. The basic voltage is decreased while the signal is retained. The development of the output-balancing system is presented, including the technical scheme, key technologies, examination and application.
- MEMS /
- hot-film /
- wall shear stress /
- sensors /
- weak signal detection

HTML全文

图 1 热膜式壁面剪应力传感器敏感原理图

Figure 1. Schematic diagram of hot-film WSS sensors

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图 2 MEMS热膜式壁面剪应力传感器阵列

Figure 2. MEMS hot-film WSS sensor array

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图 3 热膜式传感器阵列数据采集框图 (加平衡环节)

Figure 3. Data acquisition diagram of hot-film sensor array (with the OBS)

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图 4 平衡环节工作原理图

Figure 4. Schematic diagram of the OBS

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图 5 平衡环节软件流程图

Figure 5. Software diagram of the OBS

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图 6 平板壁面剪应力测量值与估算值比较

Figure 6. Compare between measured and calculated results of the flat plate

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表 1 平衡环节技术要求

Table 1. Technical requirements of the OBS

序号	技术指标	参数
1	平衡电压范围	0.5~1.5V
2	平衡精度	≤1mV
3	综合漂移	≤0.03%·(h·℃^-1)
4	输入阻抗	≥10MΩ
5	输出阻抗	≤1kΩ
6	输出噪声	≤10μV (p-p)

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表 2 干电池作初始基础电压各通道的平衡情况

Table 2. Output-balancing signal of a dry battery basic voltage

通道	平衡后电压/mV	输出噪声/(μV (p-p))
1	0.416	6
2	0.030	6
3	0.031	7
4	0.680	6
5	0.029	7
6	0.552	6
7	0.024	6
8	0.025	7

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表 3 平衡环节各项技术指标检验

Table 3. Specification test of the OBS

技术指标	检验情况或结果	结论
平衡范围	输入0.5~1.5V，间隔0.2V	满足要求
平衡精度	每通道进行3次平衡测试	满足要求
综合漂移	平衡后采集1h，漂移＜20μV	满足要求
输入阻抗	26 MΩ	满足要求
输出阻抗	230Ω	满足要求
输出噪声	≤7μV (p-p)	满足要求

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表 4 平板表面MEMS壁面剪应力测量结果

Table 4. Results of MEMS WSS measurement on a flat plate

来流流速V/(m·s^-1)	输出电压变化量ΔU/mV	壁面剪应力τ_w/Pa	经验估算τ_w/Pa	相对差别/%
0.201	39.515	0.032	0.034	4.2
0.251	43.784	0.050	0.048	4.1
0.299	50.298	0.106	——	——
0.347	55.320	0.182	——	——
0.395	60.795	0.334	——	——
0.451	63.480	0.459	0.472	2.9
0.495	65.280	0.531	0.558	4.8
0.553	66.670	0.677	0.682	0.7
0.597	67.802	0.764	0.783	2.5
0.643	68.660	0.871	0.894	2.7
0.699	69.706	1.041	1.040	0.1

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