热敏式壁面剪应力微传感器技术研究进展
Research progress on thermal wall shear stress sensors
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摘要: 基于MEMS技术的热敏式微传感器为壁面剪应力的测量提供了重要手段。本文介绍了国内外热敏式壁面剪应力微传感器技术的研究发展现状，重点从硅基和柔性聚合物基2种结构角度，对其工作原理以及不同热敏式微传感器的结构、关键工艺和性能测试进行了分析。Abstract: Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.
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