Research progress on thermal wall shear stress sensors

Sun Baoyun; Ma Binghe; Deng Jinjun; Jiang Chengyu

doi:10.11729/syltlx20170022

Volume 31 Issue 2

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Sun Baoyun, Ma Binghe, Deng Jinjun, et al. Research progress on thermal wall shear stress sensors[J]. Journal of Experiments in Fluid Mechanics, 2017, 31(2): 26-33, 43. doi: 10.11729/syltlx20170022

Citation:

Sun Baoyun, Ma Binghe, Deng Jinjun, et al. Research progress on thermal wall shear stress sensors[J]. Journal of Experiments in Fluid Mechanics, 2017, 31(2): 26-33, 43. doi: 10.11729/syltlx20170022

Citation:

Sun Baoyun, Ma Binghe, Deng Jinjun, et al. Research progress on thermal wall shear stress sensors[J]. Journal of Experiments in Fluid Mechanics, 2017, 31(2): 26-33, 43. doi: 10.11729/syltlx20170022

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Research progress on thermal wall shear stress sensors

doi: 10.11729/syltlx20170022

Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China

Received Date: 2016-12-15
Rev Recd Date: 2017-02-23
Publish Date: 2017-04-25

Abstract

Abstract

Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.
- MEMS,
- thermal,
- wall shear stress,
- micro sensor,
- measurement technology

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References(47)

References

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