Research progress on thermal wall shear stress sensors
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摘要: 基于MEMS技术的热敏式微传感器为壁面剪应力的测量提供了重要手段。本文介绍了国内外热敏式壁面剪应力微传感器技术的研究发展现状，重点从硅基和柔性聚合物基2种结构角度，对其工作原理以及不同热敏式微传感器的结构、关键工艺和性能测试进行了分析。Abstract: Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.
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Key words:
- MEMS /
- thermal /
- wall shear stress /
- micro sensor /
- measurement technology
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图 2 硅基热敏式壁面剪应力微传感器横截面结构示意图
Figure 2. Cross-sectional schematic of the silicon-based thermal shear-stress sensor
图 3 传感器热敏单元光学显微镜照片
Figure 3. An optical micrograph of the shear stress sensor sensing element
图 5 涂覆Parylene C防护层的传感器在盐水中浸泡27个月后电镜照片
Figure 5. Micrographs of a parylene C-coated shear-stress sensor (a) before and (b) after 27 months saline soaking
图 6 传感器热敏单元扫描电镜图片
Figure 6. Plan-view SEM of the active area of the platinum-based sensor
图 7 不同过热比下传感器静态标定结果
Figure 7. Static response of the sensor vs. shear stress at different overheat ratios
图 8 热敏式剪应力传感器动态标定实验结果 (过热比0.92)
Figure 8. The dynamic calibration result of the thermal shear stress sensor (overheat ratio 0.92)
图 10 (a) 封装后的传感器; (b) 与测试电路集成后的传感器
Figure 10. (a) The packaged sensors. (b) The fully assembled sensors with test circuit boards
图 11 传感器静态标定实验结果
Figure 11. The static calibration result of the thermal shear stress sensor
图 14 柔性基底上集成的硅基热敏式微传感器阵列
Figure 14. Silicon-based thermal sensors on flexible sublayer
图 16 西北工业大学研制的柔性热膜微传感器阵列
Figure 16. Flexible hot film shear stress sensor arrayfabricated by NPU
图 17 同一传感器不同过热比条件下空气静态标定实验结果
Figure 17. The static calibration result in the air at different overheat ratios
图 18 同一传感器不同过热比条件下水下标定实验结果
Figure 18. The underwater static calibration result at different overheat ratios
图 23 广岛城市大学剪应力传感器实物图
Figure 23. Shear stress sensor proposed by Hiroshima City University
图 25 新西兰兔体内MEMS传感器荧光显微镜图片
Figure 25. Fluoroscope images of in vivo testing of the MEMS sensor in NZW rabbit
图 27 (a) 未封装的传感器; (b) 传感器封装结构
Figure 27. (a) Unwired sensing device. (b) Sensing device assembled with external wires
图 28 平面结构和螺旋结构的微传感器
Figure 28. In plane and spirally rolled structure of glucose, temperature and flow micro sensors
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