MEMS梁膜结构流量传感器设计与实现

陈佩; 赵玉龙; 田边

doi:10.11729/syltlx20170001

MEMS梁膜结构流量传感器设计与实现

doi: 10.11729/syltlx20170001

陈佩^1, ,,
赵玉龙²,
田边²

1.
长安大学工程机械学院, 西安 710064
2.
西安交通大学机械制造系统工程国家重点实验室, 西安 710054

详细信息

通讯作者:
陈佩 (1989-), 男, 陕西西安人, 博士, 讲师。研究方向:MEMS传感器设计与制造。通信地址:陕西省西安市南二环路中段 (710064)。E-mail:chdchenpei@chd.edu.cn

中图分类号: TH814
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- 被引次数: 0
出版历程
- 收稿日期: 2016-12-12
- 修回日期: 2017-02-24
- 刊出日期: 2017-04-25

Design and development of MEMS based beam-membrane structure flow sensor

1.
School of Construction Machinery, Chang'an University, Xi'an 710064, China
2.
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710054, China

摘要

摘要: 流量是工业检测重要参数之一。流量检测技术随着微机械电子系统（MEMS）技术的发展与应用，向着小型化、高精度、智能化的方向发展。基于MEMS技术设计了一种梁膜结合的压差式流量传感器结构，分析了其基本工作原理，采用硅微加工工艺对传感器进行了流片加工，然后对封装完成的传感器样机进行了气流和水流静态性能测试。气流测试灵敏度为0.3508mV/（ms^-1）²，测试基本精度为0.5885%FS；水流测试灵敏度为41.5241mV/（ms^-1）²，测试基本精度为0.9323%FS。结果表明，所设计传感器具有较高的灵敏度与基本精度，从而能完成流量信号的检测。
- 微机电系统 /
- 流量 /
- 传感器 /
- 梁膜结构 /
- 微加工
Abstract: Flow is one of the important parameters in industrial detection. With the development and application of the Micro Electro-Mechanical Systems (MEMS) technology, flow detection is developing towards miniaturization, high precision and intelligence. A MEMS beam-membrane structure based differential pressure flow sensor is designed, and its working principle is analyzed. The sensor is fabricated by the silicon micromachining technology, and then the airflow test and water flow test are conducted. The sensitivity by the airflow test is 0.3508mV/(ms^-1)² and the basic accuracy is 0.5885%FS. The sensitivity by the water flow test is 41.5241mV/(ms^-1)² and the basic accuracy is 0.9323%FS. The results show that the designed sensor has sufficient sensitivity and basic accuracy for the flow measurement.
- MEMS /
- flow /
- sensor /
- beam-membrane structure /
- micromachining

HTML全文

图 1 传感器芯片结构 (单位：mm)

Figure 1. Structure of the sensor chip (unit: mm)

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图 2 压敏电阻位置及惠斯通电桥

Figure 2. Wheatstone bridge

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图 3 芯片微加工工艺流程

Figure 3. Process flow of the sensor chip

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图 4 传感器芯片显微照片

Figure 4. Fabricated sensor chip

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图 5 封装方案示意图

Figure 5. Schematic diagram of the package

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图 6 封装完成的传感器

Figure 6. The packaged sensor

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图 7 气流试验图

Figure 7. Airflow test

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图 8 气流测试结果

Figure 8. Result of airflow test

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图 9 水流试验图

Figure 9. Water flow test

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图 10 水流测试结果

Figure 10. Result of water flow test

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表 1 传感器标定测试结果

Table 1. Result of calibration test

	Air flow test	Water flow test
Environment	air	water
Temperature/℃	20	10
Supply voltage/V	±5	±5
ZERO voltage/mV	52.5	51.28
Range/(m·s^-1)	1.2~30	0.11~3
Sensitivity/(mV·(ms^-1)^-2)	0.3508	41.5241
Nonlinearity/%FS	0.0915	0.2094
Hysteresis/%FS	0.2536	0.2081
Repeatability/%FS	0.5231	0.8843
Basic accuracy/%FS	0.5885	0.9323

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参考文献(18)

[1]	Schena E, Massaroni C, Saccomandi P, et al. Flow measurement in mechanical ventilation:a review[J]. Medical Engineering & Physics, 2015, 37(3):257-264. http://www.academia.edu/13717799/Flow_measurement_in_mechanical_ventilation_A_review
[2]	蔡武昌.从FLOMEKO 2010看流量测量技术和仪表的发展[J].石油化工自动化, 2011, (05):1-4. doi: 10.3969/j.issn.1007-7324.2011.05.001 Cai W C. View of flow measurement technology and instrument development from FLOMEKO 2010[J]. Automation in Petro-chemical Industry, 2011, (05):1-4. doi: 10.3969/j.issn.1007-7324.2011.05.001
[3]	Worsfold P J, Clough R, Lohan M C, et al. Flow injection analysis as a tool for enhancing oceanographic nutrient measurements-a review[J]. Analytica Chimica Acta, 2013, 803:15-40. doi: 10.1016/j.aca.2013.06.015
[4]	Nguyen N T. Micromachined flow sensors-a review[J]. Flow Measurement and Instrumentation, 1997, 8(1):7-16. doi: 10.1016/S0955-5986(97)00019-8
[5]	Zhou L X. A review of measurements and numerical studies for the effect of wall roughness on the gas-particle flow behavior[C]. 8th International Symposium on Measurement Techniques for Multiphase Flows, 2014:115-120.
[6]	彭杰纲, 周兆英, 叶雄英.基于MEMS技术的微型流量传感器的研究进展[J].力学进展, 2005, (03):361-376. doi: 10.3321/j.issn:1000-0992.2005.03.007 Peng J G, Zhou Z Y, Ye X Y. Progresses on micromachined flow sensors based on mems technology[J]. Advances in Mechanics, 2005, (03):361-376. doi: 10.3321/j.issn:1000-0992.2005.03.007
[7]	Kuo J T W, Yu L, Meng E. Micromachined thermal flow sensors-a review[J]. Micromachines, 2012, 3(3):550-573. http://www.oalib.com/paper/159573
[8]	Nawi M N M, Abd M A, Arshad M R, et al. Review of MEMS flow sensors based on artificial hair cell sensor[J]. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 2011, 17(9):1417-1426. doi: 10.1007/s00542-011-1330-y
[9]	Ozaki Y, Ohyama T, Yasuda T, et al. Air flow sensor modeled on wind receptor hairs of insects[J]. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 2000:531-536. http://www.oalib.com/references/9041807
[10]	Ma R H, Chou P C, Wang Y H, et al. A microcantilever-based gas flow sensor for flow rate and direction detection[J]. Micro-system Technologies Micro and Nano systems Information Storage and Processing Systems, 2009, 15(8):1201-1205. http://www.oalib.com/paper/4086488
[11]	Richter M, Wackerle M, Woias P, et al. A novel flow sensor with high time resolution based on differential pressure principle[C]. MEMS 99:Twelfth IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest, New York, 1999:118-123.
[12]	Chen P, Zhao Y L, Tian B A, et al. Design and fluid-structure interaction analysis of a micromachined cantilever-based differential pressure flow sensor[J]. Micro & Nano Letters, 2014, 9(10):650-654.
[13]	Chen P, Zhao Y L, Li Y Y. Design, simulation and fabrication of a micromachined cantilever-based flow sensor[C]. 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2013:681-684.
[14]	Fitzpatrick JAJ, Inouye Y, Manley S, et al. From "there's plenty of room at the bottom" to seeing what is actually there[J]. Chemphyschem, 2014, 15(4):547-549. doi: 10.1002/cphc.201400097
[15]	Stylios G K. There is plenty of room at the bottom, RP Feynman[J]. International Journal of Clothing Science and Technology, 2013, 25(5):336-337. http://www.nanoparticles.org/pdf/Feynman.pdf
[16]	SD S. MEMS materials and processes handbook[M]. New York:Springer, 2011.
[17]	Erdmann A, Liang R G, Sezginer A, et al. Advances in lithography:introduction to the feature[J]. Applied Optics, 2014, 53(34):L1-L2.
[18]	Mendaros R G, Marcelo M T. ICP-RIE platinum (Pt) sputter etching[C]. 2014 IEEE 21st International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2014:114-117.